High Resolution Differential Capacitance Detection Scheme for Micro Levitated Rotor Gyroscope

A differential capacitance detection circuit aiming at detection of rotating angle in a novel levitation structure is presented. To ensure the low non-linearity and high resolution, noise analysis and non-linearity simulation are conducted. In the capacitance interface, an integral charge amplifier is adopted as a front end amplifier to reduce the parasitic capacitance caused by connecting wire. For the novel differential capacitance bridge with a coupling capacitor, the noise floor and non-linearity of the detection circuit are analyzed, and the results show that the detecting circuit is capable of realizing angle detection with high angular resolution and relative low non-linearity.With a specially designed printed circuit board, the circuit is simulated by PSpice. The practical experiment shows that the detection board can achieve angular resolution as high as 0.04° with a non-linearity error 2.3%.

作 者： Huang Xiaogang Chen Wenyuan Liu Wu Zhang Weiping Wu Xiaosheng   作者單位： Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China  刊 名： 中國航空學(xué)報(bào)(英文版)  ISTIC 英文刊名： CHINESE JOURNAL OF AERONAUTICS  年，卷(期)： 2007 20(6)  分類號： V2  關(guān)鍵詞： MEMS   micro gyroscope   capacitance sensing   inertial sensor   angle detection  

【High Resolution Differential Capacit】相關(guān)文章：

It is (high) time that05-04

Life of High Quality05-04

IMPACTS OF CUMULUS PARAMETERIZATION AND RESOLUTION ON THE MJO SIMULATION04-27

單詞high的中文是什么意思02-12

The secular variation of inner zone high energy proton environment in the SAA04-26

Dover High School畢業(yè)生英文求職信04-27

Determination of Grüneisen EOS of MSN Alloy Steel Under High Pressure04-27

Developing newly emerging high-end industries in the low-carbon economy04-26

Preparation and Characterization of Refuse Derived Fuel for Pyrolysis and Gasification by Bindless High Pressure Briquet04-26

Removal of high concentrated ammonia nitrogen from landfill leachate by landfilled waste layer04-25