Numerical analysis of capacitive pressure micro-sensors

Pseudo-spectral method is used to numerically model the diaphragm deflection of capacitive pressure micro-sensor under uniform load. The relationship between the capacitance of the micro-sensor and the load is then analyzed after the description of the computational principle. For normal mode micro-sensor, the tensile force on the diaphragm can be ignored and thereby the capacitance increases linearly with the load increase only when the load is so small that the resultant deflection is less than the diaphragm thickness. The linear relationship between the capacitance and the load turns to be nonlinear thereafter and the capacitance rises dramatically with the constant increase of the load. For touch mode micro-sensor, an algorithm to determine the touch radius of the diaphragm and substrate is presented and the curve of capacitance versus load is shown on the numerical results laying a theoretical foundation for micro-sensor design.

作 者： WANG Xiaomin Li mingxuan WANG Chenghao   作者單位： Institute of Acoustics, Chinese Academy of Sciences, Beijing 100080, China  刊 名： 中國科學(xué)E輯（英文版）  SCI 英文刊名： SCIENCE IN CHINA SERIES E:ENGINEERING & MATERIALS SCIENCE  年，卷(期)： 2005 48(2)  分類號：   關(guān)鍵詞： pseudo-spectral method   capacitive pressure micro-sensor   capacitance vs. load  

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